CAMECA: SIMS, NanoSIMS, EPMA, LEXES and Atom Probe instruments for microanalysis KLEORA, EIKOS, Microanalysis, SIMS, EPMA, APT, LEXES, secondary ion mass spectrometry, electron probe microanalysis, atom probe tomography, semiconductor metrology CAMECA manufactures and services high-performance analytical instrumentation for production support, quality monitoring, and basic materials research.